内容简介：
A summary of applications and developments impacting smart sensors, updated to reflect IEEE 1451.2 smart sensor standards. Utilizing information in smart sensor, microelectromechanical systems (MEMS), and microelectronic research and development, it seeks to provide the technical and practical information needed to keep designs and products on the cutting edge. It also reviews how advances in fuzzy logic and neural networks continue to determine the direction of smart sensor development. This work combines information on micromachining and microelectronics, two important aspects of smart sensor technology.